Hartmut Enkisch
(Carl Zeiss SMT GmbH)
15/10/2025, 09:00
oral
EUV-Optics with NA=0.33 are fully industrialized and are a key ingredient to the state-of-the-art semiconductor devices. We will shortly comment on the relevant performance indices.
We will also describe the outstanding performance of the high-NA optics with NA=0.55 currently being introduced into the market. Finally, we will comment on the challenges that would come with either higher NA...
