Scope
This year's seminar with the scientific sessions on October 14 -15 is the eighth in a series launched in 2011. It is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces. Following our seminar, PTB will host the workshop on "Quantification of Uncertainties in Nano-Metrology" (QUNOM) on October 16th and 17th, 2025.
Beforehand, on the afternoon of 13 October, we will be offering the opportunity to visit our Willy-Wien-Laboratory at the Metrology Light Source in Berlin-Adlershof. Registration with further data for the radiation protection office by Sep 30, 2025, necessary.
Previous seminars: 2011, 2013, 2015, 2017, 2019 , 2021, 2023.
Questions about further information may be addressed to: euv2025@ptb.de
Venue
The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.
Sponsors
The event is thanksfully supported by
