PTB-Seminar on VUV and EUV Metrology 2025

Session

Session 4

15 Oct 2025, 09:40

Lecture Hall in Hermann-von-Helmholtz Building (PTB Berlin)

22. Development of a Compact Capillary Discharge for Actinic EUV Metrology Applications

Dr Norbert Böwering (Fakultät für Physik, Universität Bielefeld)

15/10/2025, 09:40

oral

Norbert Böwering(1) and Christian Meier(1)
Bowering@physik.uni-bielefeld.de
(1) Bielefeld University, Universitätsstraße, 33615 Bielefeld, Germany

Conventional EUV lasers in pinched capillary-discharge configurations for neon-like argon ions at 46.9 nm have mostly employed fairly inefficient excitation schemes using very high supply voltages (≥100 kV) and very large stored energies...

7. High repetition rate, high average power XUV sources based on High Harmonic Generation

Bastian Manschwetus (Class 5 Photonics)

15/10/2025, 10:00

oral

High harmonic generation (HHG) sources [1] provide fully coherent laser-like radiation in the Extreme-Ultraviolet (EUV/XUV) and soft X-ray spectral range with femto- or attosecond pulse duration. These sources are ideal metrology tools in scientific or industrial applications: The short wavelength allows very high spatial resolution in scattering or imaging of nanostructures created by...