PTB-Seminar on VUV and EUV Metrology 2025

Session

Keynote 2

15 Oct 2025, 09:00

Lecture Hall in Hermann-von-Helmholtz Building (PTB Berlin)

17. Optics for EUV-Lithography, now and then

Hartmut Enkisch (Carl Zeiss SMT GmbH)

15/10/2025, 09:00

oral

EUV-Optics with NA=0.33 are fully industrialized and are a key ingredient to the state-of-the-art semiconductor devices. We will shortly comment on the relevant performance indices.
We will also describe the outstanding performance of the high-NA optics with NA=0.55 currently being introduced into the market. Finally, we will comment on the challenges that would come with either higher NA...