PTB-Seminar on VUV and EUV Metrology 2025

Session

Session 2

14 Oct 2025, 14:30

Lecture Hall in Hermann-von-Helmholtz Building (PTB Berlin)

38. Metrology Light Source: Current Achievements and Future Horizons

Carsten Mai

14/10/2025, 14:30

oral

The Physikalisch-Technische Bundesanstalt (PTB), Germany’s national metrology institute, operates the 629 MeV electron storage ring Metrology Light Source (MLS) in Berlin-Adlershof in close collaboration with Helmholtz-Zentrum Berlin (HZB). With more than 8000 operating hours per year, the MLS supports a broad range of metrology applications. In dedicated shifts, it also serves as a unique...

25. Holography is growing along with the requirements of new beam line gratings

Mr Matthias Burkhardt (ZEISS Microoptics, Carl Zeiss Jena GmbH)

14/10/2025, 15:00

oral

Zeiss is a leading manufacturer of high-quality holographic diffraction gratings, with an emphasis on beamlines in synchrotrons and linear accelerators as well. These gratings exhibit exceptional properties, including low stray light, high diffraction efficiency, and the absence of regular addressing errors in grating line distribution. Additionally, Zeiss has the capability to produce both...

10. The BEAR beamline at Elettra 2.0

angelo giglia (CNR, ISTITUTO OFFICINA DEI MATERIALI)

14/10/2025, 15:20

oral

The beamline BEAR was open to users from 2003 till July 2025, and it is expected to reopen in 2028 after the upgrade to Elettra 2.0. BEAR is a IOM-CNR bending magnet beamline, working in the spectral region 2.8-1600 eV (443-0.775 nm) [1].
Elettra is the Italian synchrotron radiation facility and it is currently upgrading to Elettra 2.0, a new light source with a significant enhancement of the...

5. Improvements to the SURF III EUV Metrology Capabilities

Uwe Arp (National Institute of Standards and Technology)

oral

NIST's involvement in extreme-ultraviolet (EUV) metrology dates to the 1960s with the advent of synchrotron radiation from SURF. Initially, the primary focus was on calibrating and characterizing photodetectors. By the 1980s, NIST expanded its capabilities to include the characterization of EUV optics.
A significant leap occurred in the 1990s when, in collaboration with the Defense Advanced...