PTB
Author in the following contributions
- Updated Optical Data for Transition Metals in the EUV Range
- Exploring the soft X-ray energy range for next generation nanostructure metrology
- Enhanced thin film characterization through combined S- and P-polarized EUV reflectometry
- Investigation of the Optical Constants of Amorphous SiO₂ and Y-Cut Quartz from the Extreme to the Vacuum Ultraviolet Spectral Region